ITK compile: failed to open file H5make_libsetting.exe

I am compiling ITK from source code, and it reports a bug for release version:

can not open file "D:\ITK\build\bin\Release\H5make_libsettings.ext"

But the compiling is OK for debug version.

The environment is:

ITK 5.2.1
win 10
vs 2019
cmake 3.22.1

Why it failed in Release but succeed in Debug?

There is H5make_libsettings.exe in both Debug and Release folders on my computer. There is no H5make_libsettings.ext anywhere on my computer, and I have multiple builds of ITK.

What is the full error message? Can you try a clean build? That means configure/build in a new directory.